Critical dimension measurement system and method of measuring critical dimensions using same

ABSTRACT

A critical dimension measurement system includes a voltage measurement circuit, a control circuit, and a critical dimension measurement circuit. The voltage measurement circuit may measure potentials of mask patterns of a photomask. The control circuit may include an information storage circuit for storing distribution information on the potentials of the mask patterns, measured by the voltage measurement circuit, and information on layout patterns corresponding to the mask patterns of the photomask. The critical dimension measurement circuit may be operated, by the control circuit, in a first measurement mode and a second measurement mode running for a shorter time than the first measurement mode, and measure critical dimensions of the mask patterns.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority under 35 U.S.C. § 119 to Korean PatentApplication No. 10-2017-0122302, filed on Sep. 22, 2017 in the KoreanIntellectual Property Office and U.S. patent application Ser. No.15/973,912 filed May 8, 2018, the disclosure of which is incorporated byreference herein in its entirety.

TECHNICAL FIELD

Exemplary embodiments of the present inventive concept relate to acritical dimension measurement system and a critical dimensionmeasurement method, and more particularly, to a critical dimensionmeasurement system which may measure critical dimensions of maskpatterns, and a method of measuring critical dimensions using the same.

DISCUSSION OF RELATED ART

With increases in degrees of integration and performance ofsemiconductor devices, the number of design rules with regard thereto isdecreasing, and the widths of patterns forming semiconductor devices arebeing narrowed. The size of mask patterns of photomasks used inphotolithography processes, as well as the size of photoresist patternsfor forming the patterns to form semiconductor devices, as describedabove, is being reduced. As the size of mask patterns decreases, anamount of time required to measure the critical dimensions of maskpatterns is increased.

SUMMARY

According to an exemplary embodiment of the present inventive concept, acritical dimension measurement system includes a voltage measurementcircuit, a control circuit, and a critical dimension measurementcircuit. The voltage measurement circuit may measure potentials of maskpatterns of a photomask. The control circuit may include an informationstorage circuit for storing distribution information on the potentialsof the mask patterns, measured by the voltage measurement circuit, andinformation on layout patterns corresponding to the mask patterns of thephotomask. The critical dimension measurement circuit may be operated,by the control circuit, in a first measurement mode and a secondmeasurement mode running for a shorter time than the first measurementmode, and measure critical dimensions of the mask patterns.

According to an exemplary embodiment of the present inventive concept, acritical dimension measurement system includes a surface potentialmeasurement circuit, a control circuit, and a critical dimensionmeasurement circuit. The surface potential measurement circuit maymeasure potentials of mask patterns of a photomask. The control circuitmay include an information storage part configured to store distributioninformation on the potentials of the mask patterns measured by thesurface potential measurement circuit. The critical dimensionmeasurement circuit may exchange an electrical signal with the controlcircuit, and measure critical dimensions of the mask patterns of thephotomask, transferred from the surface potential measurement circuit,in a default measurement mode and a simple measurement mode running fora shorter time than the default measurement mode, using the distributioninformation on the potentials of the mask patterns.

According to an exemplary embodiment of the present inventive concept, acritical dimension measurement system includes a surface potentialmeasurement circuit and a critical dimension measurement circuit. Thesurface potential measurement circuit may measure potentials of maskpatterns. The critical dimension measurement circuit may measurecritical dimensions of the mask patterns, transferred from the surfacepotential measurement circuit, in a default measurement mode and asimple measurement mode running for a shorter time than the defaultmeasurement mode, using distribution information on the measuredpotentials of the mask patterns.

According to an exemplary embodiment of the present inventive concept, amethod of measuring critical dimensions includes forming a layoutincluding layout patterns, forming a photomask including mask patternscorresponding to the layout patterns, storing information on the layoutpatterns, classifying measurement sites of the photomask as a defaultmeasurement site and a simple measurement site, using the information onthe layout patterns, measuring critical dimensions of a first maskpattern within the default measurement site in a default measurementmode, and measuring critical dimensions of a second mask pattern withinthe simple measurement site in a simple measurement mode. The simplemeasurement mode may run for a shorter time than the default measurementmode.

According to an exemplary embodiment of the present inventive concept, amethod of measuring critical dimensions includes forming a layoutincluding layout patterns, forming mask patterns corresponding to thelayout patterns, setting, with a control circuit of a critical dimensionmeasurement apparatus, a default measurement mode and a simplemeasurement mode running for a shorter time than the default measurementmode, using information on the layout patterns, and measuring criticaldimensions of the mask patterns with the critical dimension measurementapparatus. Critical dimensions of first mask patterns of the maskpatterns may be measured in the default measurement mode, and criticaldimensions of second mask patterns of the mask patterns may be measuredin the simple measurement mode.

According to an exemplary embodiment of the present inventive concept, amethod of measuring critical dimensions includes forming a layoutincluding layout patterns, using a computer system, forming a photomaskincluding mask patterns corresponding to the layout patterns, using amask manufacturing apparatus, storing information on a defaultmeasurement site and a simple measurement site of the photomask with acritical dimension measurement apparatus, measuring, with the criticaldimension measurement apparatus, critical dimensions of a first maskpattern within the default measurement site in a default measurementmode, and measuring, with the critical dimension measurement apparatus,critical dimensions of a second mask pattern within the simplemeasurement site in a simple measurement mode running for a shorter timethan the default measurement mode.

BRIEF DESCRIPTION OF DRAWINGS

The above and other aspects and features of the present inventiveconcept will be more clearly understood by describing in detailexemplary embodiments thereof with reference to the accompanyingdrawings.

FIG. 1 is a block diagram schematically illustrating a criticaldimension measurement system, according to an exemplary embodiment ofthe present inventive concept.

FIG. 2 is a conceptual plan view illustrating a layout, according to anexemplary embodiment of the present inventive concept.

FIG. 3 is a plan view illustrating measurement regions of interest oflayout patterns, according to an exemplary embodiment of the presentinventive concept.

FIG. 4 is a cross-sectional view illustrating a photomask, according toan exemplary embodiment of the present inventive concept.

FIG. 5 is a schematic cross-sectional view illustrating a surfacepotential measurement device measuring the potential of mask patterns ofa photomask, according to an exemplary embodiment of the presentinventive concept.

FIG. 6 is a graph illustrating the relationship between the length ofmeasurement regions of interest and reproducibility according to anexemplary embodiment of the present inventive concept.

FIG. 7A is a flowchart illustrating a method of measuring criticaldimensions, according to an exemplary embodiment of the presentinventive concept.

FIG. 7B is a flowchart illustrating a method of measuring criticaldimensions, according to an exemplary embodiment of the presentinventive concept.

FIGS. 8A and 8B are flowcharts illustrating a method of measuringcritical dimensions, according to exemplary embodiments of the presentinventive concept.

FIGS. 9A, 9B, and 9C are flowcharts illustrating a method of measuringcritical dimensions, according to exemplary embodiments of the presentinventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Exemplary embodiments of the present inventive concept provide acritical dimension measurement system, which may reduce an amount oftime required to measure critical dimensions.

Exemplary embodiments of the present inventive concept also provide amethod of measuring critical dimensions, which may reduce an amount oftime required to measure critical dimensions.

Exemplary embodiments of the present inventive concept will be describedmore fully hereinafter with reference to the accompanying drawings. Likereference numerals may refer to like elements throughout thisapplication.

An example of a critical dimension measurement system, according to anexemplary embodiment of the present inventive concept, will be describedbelow. FIG. 1 is a block diagram schematically illustrating a criticaldimension measurement system, according to an exemplary embodiment ofthe present inventive concept.

Referring to FIG. 1, the critical dimension measurement system mayinclude a computer system 10, a mask manufacturing apparatus 15, and acritical dimension measurement apparatus 100.

The computer system 10 may include a workstation 3, and a terminal or adisplay device 6 connected to the workstation 3. The computer system 10may include a design tool able to design semiconductor integratedcircuits (ICs) and/or a layout tool able to draw layouts of designedICs. Thus, the critical dimension measurement system may form a layoutincluding layout patterns, using the computer system 10.

The critical dimension measurement system may form a photomask 20, usinga layout formed using the computer system 10. The photomask 20 may beformed by the mask manufacturing apparatus 15. The photomask 20 mayinclude mask patterns corresponding to the layout patterns of thelayout.

The critical dimensions of the mask patterns of the photomask 20 may bemeasured with the critical dimension measurement apparatus 100. Thecritical dimension measurement apparatus 100 may be a critical dimensionscanning electron microscope (CD-SEM).

In an exemplary embodiment of the present inventive concept, thecritical dimension measurement apparatus 100 may include a surfacepotential measurement unit 110, a critical dimension measurement unit130, a signal processing unit 155, a display unit 170, and a controlunit 160.

The photomask 20, formed by the mask manufacturing apparatus 15, may bemoved onto a first stage 113 within the surface potential measurementunit 110. The surface potential measurement unit 110 may include asurface potential measurement device 116 able to measure the potentialof the mask patterns of the photomask 20 placed on the first stage 113.For example, the surface potential measurement unit 110 may be a voltagemeasurement unit and the surface potential measurement device 116 may bea voltage measurement device.

The critical dimension measurement unit may include a second stage 131on which the photomask 20, including the mask patterns of which thepotential has been measured by the surface potential measurement unit110, may be moved, placed, and aligned.

The critical dimension measurement unit 130 may include an electron beamirradiation device irradiating, with an electron beam 145, the surfaceof the photomask 20 placed on the second stage 131, and a detector 151detecting secondary electrons 148 generated by irradiating the surfaceof the photomask 20 with the electron beam 145. The critical dimensionmeasurement unit 130 may operate in a default measurement mode or in asimple measurement mode running for a shorter time than the defaultmeasurement mode.

The electron beam irradiation device may include an electron gun 133, acondenser lens 136, a deflecting coil 139, and an object lens 142. Theelectron gun 133 may emit electrons. Electrons, emitted from theelectron gun 133, may be converted into the electron beam 145, whilesequentially passing through the condenser lens 136, the deflecting coil139, and the object lens 142, to be radiated onto the surface of thephotomask 20 aligned on the second stage 131.

The amount of the secondary electrons 148, detected by the detector 151,may be converted into image data by the signal processing unit 155, andsuch image data may be displayed as an image on the display unit 170.

The control unit 160 may include an information storage part 163. Theinformation storage part 163 may store programs and information formeasuring the critical dimensions of the mask patterns of the photomask20. The information storage part 163 may also store information on thelayout patterns of the layout formed by the computer system 10. Theinformation storage part 163 may further store information on thesurface potential distribution of the photomask 20 measured by thesurface potential measurement unit 110. The information on the surfacepotential distribution of the photomask 20 may include information onthe potential of the mask patterns.

The control unit 160 may exchange an electrical signal with the criticaldimension measurement unit 130. The control unit 160 may control thecritical dimension measurement unit 130 to operate in the defaultmeasurement mode or in the simple measurement mode, using theinformation on the layout patterns and the information on the surfacepotential distribution of the photomask 20 stored in the informationstorage part 163. The control unit 160 may calculate the criticaldimensions of the mask patterns, using information on the mask patternsof the photomask 20, for example, images of the mask patterns of thephotomask 20, obtained according to operations of the critical dimensionmeasurement unit 130. The information storage part 163, included in thecontrol unit 160, may store the images and the critical dimensions ofthe mask patterns of the photomask 20.

According to an exemplary embodiment of the present inventive concept,the surface potential measurement unit 110, the critical dimensionmeasurement unit 130, the signal processing unit 155, the display unit170, the control unit 160, and the information storage part 163 may becircuits.

An example of the layout that may be formed by the computer system 10will be described with reference to FIG. 2. FIG. 2 is a conceptual planview of a layout, according to an exemplary embodiment of the presentinventive concept.

Referring to FIG. 2, a layout 30 that may be formed by the computersystem 10 of FIG. 1 may have layout areas 30 a to 30 f. The layout areas30 a to 30 f may include layout patterns.

In an example, the layout areas 30 a to 30 f may include a first layoutarea 30 a, a second layout area 30 b, a third layout area 30 c, a fourthlayout area 30 d, a fifth layout area 30 e, and a sixth layout area 30f.

In an example, the layout areas 30 a to 30 f may include various shapesand sizes of layout patterns. For example, the first to third layoutareas 30 a to 30 c may be areas including layout patterns 33, 36, and 39having a line shape, such as a wiring or the like, the fourth and fifthlayout areas 30 d and 30 e may be areas including layout patterns 42 and45 having an isolated shape, such as a contact or pad, and the sixthlayout area 30 f may be an area including layout patterns 48 a and 48 bhaving a line shape as well as a layout pattern 48 c having an isolatedshape.

In an example, a portion of the layout areas 30 a to 30 f may includethe same shape and size of layout patterns. For example, the firstlayout area 30 a may be provided as a plurality of first layout areas 30a, which may include the same shape and size of layout patterns 33.Similarly, the fourth layout area 30 d may be provided as a plurality offourth layout areas 30 d, which may include the same shape and size oflayout patterns 42.

In an example, the layout patterns 33 within the first layout area 30 amay have a higher arrangement density than the layout patterns 36 withinthe second layout area 30 b.

In an example, the layout patterns 39 within the third layout area 30 cmay have a greater width than the layout patterns 33 within the firstlayout area 30 a and/or the layout patterns 36 within the second layoutarea 30 b.

In an example, the layout patterns 42 within the fourth layout area 30 dmay have a lower arrangement density than the layout patterns 45 withinthe fifth layout area 30 e.

In FIG. 2, the layout patterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 cwithin the first to sixth layout areas 30 a to 30 f are intended toillustrate exemplary embodiments of the present inventive concept, andmay be modified to have various shapes and sizes.

In an exemplary embodiment of the present inventive concept, the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c of the layout 30 maycorrespond to the mask patterns of the photomask 20, as described abovewith reference to FIG. 1. Thus, the layout 30 of FIG. 2 may be replacedwith the photomask 20, for the purpose of description. Further, thelayout patterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c of the layout30 of FIG. 2 may be replaced with the mask patterns of the photomask 20,for the purpose of description. Moreover, planar shapes of the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c of the layout 30 ofFIG. 2 may be those of the mask patterns of the photomask 20.

In an example, the first to sixth layout areas 30 a to 30 f of thelayout 30 may correspond to first to sixth measurement sites 20 a to 20f of the photomask 20. The first to sixth measurement sites 20 a to 20 fof the photomask 20 of FIG. 1 may be set by allowing semiconductordesigners, developers, or engineers to designate areas of a photomask inwhich defects may be highly likely to occur, or areas having patterns ofwhich the critical dimensions are required to be measured.

In an exemplary embodiment of the present inventive concept, the layoutpatterns of each of the layout areas 30 a to 30 f may have measurementregions of interest. The measurement regions of interest may be areaswhich are required to be measured. Here, the measurement regions ofinterest of the layout patterns may also be areas for measuring thecritical dimensions of the mask patterns within the measurement sites ofthe photomask 20. For example, the measurement regions of interest maybe areas of layout patterns corresponding to areas of mask patterns, ofwhich the critical dimensions are required to be measured, of thephotomask 20 of FIG. 1.

An example of the above-mentioned measurement regions of interest of thelayout patterns will be described with reference to FIG. 3. FIG. 3 is aplan view illustrating measurement regions of interest of layoutpatterns, according to an exemplary embodiment of the present inventiveconcept. Planar shapes and sizes of layout patterns 48 a, 48 b, and 48c, as illustrated in FIG. 3, are only examples, and may be modified invarious manners.

Referring to FIG. 3, the layout 30 may include a first line layoutpattern 48 a, a second line layout pattern 48 b, and a third isolatedlayout pattern 48 c.

The first line layout pattern 48 a may include a first measurementregion of interest ROI_1, the second line layout pattern 48 b mayinclude a second measurement region of interest ROI_2, and the thirdisolated layout pattern 48 c may include a third measurement region ofinterest ROI_3.

In an example, the lengths of the first and second measurement regionsof interest ROI_1 and ROI_2 may be greater than that of the thirdmeasurement region of interest ROI_3. In an example, the length of thefirst measurement region of interest ROI_1 may be greater than that ofthe second measurement region of interest ROI_2.

In an example, the first line layout pattern 48 a, the second linelayout pattern 48 b, and the third isolated layout pattern 48 c may bethe layout patterns of the sixth layout area 30 f described above withreference to FIG. 2. Thus, information on the first to third measurementregions of interest ROI_1 to ROI_3 of the first line layout pattern 48a, the second line layout pattern 48 b, and the third isolated layoutpattern 48 c of the sixth layout area 30 f may be stored in theinformation storage part 163 of the control unit 160 of FIG. 1. Theinformation on the first to third measurement regions of interest ROI_1to ROI_3 may include information on the lengths and widths Wa, Wb, andWc of the first to third measurement regions of interest ROI_1 to ROI_3.

The information on the first to third measurement regions of interestROI_1 to ROI_3 may be used to measure the critical dimensions of maskpatterns within the sixth measurement site 20 f of the photomask 20. Tomeasure the critical dimensions of the mask patterns, the electron beam145, described above with reference to FIG. 1, may be radiated to areasof the mask patterns corresponding to the first to third measurementregions of interest ROI_1 to ROI_3 of the first line layout pattern 48a, the second line layout pattern 48 b, and the third isolated layoutpattern 48 c of the sixth layout area 30 f in a width direction D_(W),perpendicular to a length direction D_(L) of the first to thirdmeasurement regions of interest ROI_1 to ROI_3.

Since the layout 30 may be formed using the computer system 10 of FIG.1, the lengths and the widths Wa, Wb, and Wc of the first to thirdmeasurement regions of interest ROI_1 to ROI_3 of the layout patterns 48a, 48 b, and 48 c of the layout 30 may be obtained by software.

An example of the photomask 20, including the mask patterns, will bedescribed with reference to FIG. 4. FIG. 4 is a cross-sectional viewillustrating a photomask, according to an exemplary embodiment of thepresent inventive concept.

Referring to FIG. 4, the photomask 20 may include a substrate 22 andmask patterns 24 disposed on the substrate 22. In an example, thephotomask 20 may be a phase inversion mask. However, the presentinventive concept is not limited thereto. For example, the photomask 20may be a binary mask. Hereinafter, the phase inversion mask will beillustrated as an example, for convenience of description.

The photomask 20 may include an outer mask pattern 25 surrounding themask patterns 24, and a light blocking pattern 28 covering the outermask pattern 25.

The substrate 22 may be a transparent substrate. For example, thesubstrate 22 may be formed of glass or quartz. Each of the mask patterns24 and the outer mask pattern 25 may be formed of a compound ofmolybdenum (Mo) and silicon (Si). For example, the mask patterns 24 andthe outer mask pattern 25 may be formed of a MoSi compound, or a MoSicompound containing impurities, for example, nitrogen (N) and/or oxygen(O). The light blocking pattern 28 may be formed of a material able toblock light. For example, the light blocking pattern 28 may be formed ofa metal material, such as chromium (Cr) or the like, or an inorganicmaterial.

In an example, the mask patterns 24 may have a planar shapecorresponding to those of the layout patterns 33, 36, 39, 42, 45, 48 a,48 b, and 48 c of the layout 30.

As described above with reference to FIG. 1, the surface potentialmeasurement unit 110 may include the surface potential measurementdevice 116. An example of the surface potential measurement device 116will be described with reference to FIG. 5. FIG. 5 is a schematiccross-sectional view illustrating a surface potential measurement devicemeasuring the potential of mask patterns of a photomask, according to anexemplary embodiment of the present inventive concept.

Referring to FIG. 5, the surface potential measurement device 116 of thesurface potential measurement unit 110, described above with referenceto FIG. 1, may include at least two probes 116 a and 116 b. For example,the potential of a mask pattern 24 a to be measured may be measured bymoving the at least two probes 116 a and 116 b of the surface potentialmeasurement device 116 up and down, such that the at least two probes116 a and 116 b may be in contact with the mask pattern 24 a to bemeasured, of the mask patterns 24 of the photomask 20. The mask pattern24 a to be measured may be a mask pattern having a shape correspondingto that of any one of the layout patterns 33, 36, 39, 42, 45, 48 a, 48b, and 48 c described above with reference to FIG. 2.

FIG. 6 is a graph illustrating the relationship between the length ofmeasurement regions of interest and reproducibility according to anexemplary embodiment of the inventive concept. In FIG. 6, the horizontalaxis X represents the length of measurement regions of interest, and thevertical axis Y represents reproducibility. The vertical axis Y may bethe difference between the actual width of a mask pattern, and the widthof the mask pattern measured with the critical dimension measurementapparatus, or may be an error caused by an instrument. The graph,illustrated in FIG. 6, may be obtained while the critical dimensionmeasurement apparatus is set up using a reference photomask.

In FIG. 6, the length of a measurement region of interest (ROI_L) mayincrease in the horizontal axis X direction, and a difference betweenthe actual width of the mask pattern and the width of the mask patternmeasured with the critical dimension measurement apparatus may increasein the vertical axis Y direction. In the graph of FIG. 6, a length A ofa reference measurement region of interest on the horizontal axis X isdisplayed, and a reference difference B on the vertical axis Y asdescribed above may be understood as a significantly increased error ofan allowable mask pattern width.

It can be seen from the graph of FIG. 6 that, when the length of themeasurement region of interest is greater than the length A of thereference measurement region of interest, the reliability of criticaldimensions measured with the critical dimension measurement apparatusmay be high, and when the length of the measurement region of interestis less than the length A of the reference measurement region ofinterest, the reliability of critical dimensions measured with thecritical dimension measurement apparatus may be low.

Examples of a method of measuring critical dimensions of mask patternsof a photomask, according to exemplary embodiments of the presentinventive concept, will be described below. FIG. 7A is a flowchartillustrating a method of measuring critical dimensions, according to anexemplary embodiment of the present inventive concept, and FIG. 7B is aflowchart illustrating a method of measuring critical dimensions,according to an exemplary embodiment of the present inventive concept.

Referring to FIGS. 1, 6, and 7A, the layout 30 including the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c may be formed (S10).The layout 30 may be formed using the computer system 10. The photomask20 may be formed (S20). The photomask 20 may be formed by the maskmanufacturing apparatus 15.

The information on the layout patterns 33, 36, 39, 42, 45, 48 a, 48 b,and 48 c may be stored (S30). The information on the layout patterns 33,36, 39, 42, 45, 48 a, 48 b, and 48 c may be stored in the informationstorage part 163 of the control unit 160 included in the criticaldimension measurement apparatus 100. The information on the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c may includeinformation on the shape (or image), arrangement density, and width ofeach of the layout patterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c,and on the lengths of measurement regions of interest of the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c.

The measurement sites of the photomask 20 may be classified as a defaultmeasurement site and a simple measurement site (S40). The control unit160 of FIG. 1 may classify the measurement sites of the photomask 20 asthe default measurement site and the simple measurement site, and theinformation storage part 163 of the control unit 160 of FIG. 1 may storeinformation on the default measurement site and the simple measurementsite. Classifying the measurement sites of the photomask 20 as thedefault measurement site and the simple measurement site may includeusing the information on the layout patterns 33, 36, 39, 42, 45, 48 a,48 b, and 48 c. The information on the layout patterns 33, 36, 39, 42,45, 48 a, 48 b, and 48 c may include the information on the arrangementdensity and width of each of the layout patterns 33, 36, 39, 42, 45, 48a, 48 b, and 48 c, and on the lengths of measurement regions of interestof the layout patterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c.

In FIG. 7B, the potential of the mask patterns of the photomask may bemeasured, and information on the potential may be stored (S25). Thus,classifying the measurement sites of the photomask 20 as the defaultmeasurement site and the simple measurement site may include using thepotential information on the mask patterns, described above withreference to FIG. 7A, together with the information on the layoutpatterns 33, 36, 39, 42, 45, 48 a, 48 b, and 48 c.

Referring to FIGS. 1 through 6, and 7A or 7B, the critical dimensions ofthe mask patterns within the measurement sites of the photomask 20 maybe measured (S50). The critical dimension measurement unit may be movedto the default measurement site (S60). Subsequently, the criticaldimensions of a first mask pattern within the default measurement sitemay be measured in the default measurement mode (S70).

The critical dimension measurement unit may be moved to the simplemeasurement site (S80). Subsequently, the critical dimensions of asecond mask pattern within the simple measurement site may be measuredin the simple measurement site running for a shorter time than thedefault measurement mode (S90).

In an example, measuring the critical dimensions of the mask patternswithin the measurement sites of the photomask 20 may include moving tothe default measurement site, measuring the critical dimensions of thefirst mask pattern within the default measurement site in the defaultmeasurement mode, moving to the simple measurement site, and measuringthe critical dimensions of the second mask pattern within the simplemeasurement site in the simple measurement mode. In a different manner,measuring the critical dimensions of the mask patterns within themeasurement sites of the photomask 20 may include moving to the simplemeasurement site, measuring the critical dimensions of the second maskpattern within the simple measurement site in the simple measurementmode, moving to the default measurement site, and measuring the criticaldimensions of the first mask pattern within the default measurement sitein the default measurement mode.

With reference to FIG. 2, since the photomask 20 is formed using thelayout 30, the first to sixth layout areas 30 a to 30 f of the layout 30may be replaced with the first to sixth measurement sites 20 a to 20 fof the photomask 20, and the layout patterns 33, 36, 39, 42, 45, 48 a,48 b, and 48 c may be replaced with the mask patterns of the photomask20, for the purpose of description.

In an exemplary embodiment of the present inventive concept, among thefirst to sixth measurement sites 20 a to 20 f of the photomask 20, thedefault measurement site may be a site with a mask pattern having a highdegree of difficulty of critical dimension measurement, and the simplemeasurement site may be a site with a mask pattern having a low degreeof difficulty of critical dimension measurement.

In an example, the first to sixth measurement sites 20 a to 20 f of thephotomask 20 may be classified as a preceding measurement site of whichthe critical dimension measurement is performed, and a subsequentmeasurement site of which the critical dimension measurement isperformed immediately after the critical dimension measurement of thepreceding measurement site. The preceding measurement site and thesubsequent measurement site may be classified as a default measurementsite or a simple measurement site, using information on a layout patterncorresponding to a mask pattern within the preceding measurement siteand on a layout pattern corresponding to a mask pattern within thesubsequent measurement site.

In an example, when a measurement site that may be the precedingmeasurement site among the first to sixth measurement sites 20 a to 20 fof the photomask 20 is the default measurement site, a measurement sitethat may be the subsequent measurement site thereamong may be thedefault measurement site or the simple measurement site. For example,when a degree of difficulty of critical dimension measurement of a maskpattern within the subsequent measurement site is lower than a degree ofdifficulty of critical dimension measurement of a mask pattern withinthe preceding measurement site that may be the default measurement site,the subsequent measurement site may be set or classified as the simplemeasurement site. In a different manner, when a degree of difficulty ofcritical dimension measurement of a mask pattern within the subsequentmeasurement site is higher than or equal to a degree of difficulty ofcritical dimension measurement of a mask pattern within the precedingmeasurement site that may be the default measurement site, thesubsequent measurement site may be set or classified as the defaultmeasurement site.

In an example, when the shapes and sizes of a mask pattern within thesubsequent measurement site and a mask pattern within the precedingmeasurement site are substantially the same, the subsequent measurementsite may be set or classified as the simple measurement site. Forexample, when the first measurement sites 20 a corresponding to thefirst layout areas 30 a, described above with reference to FIG. 2, areset as the preceding measurement site and the subsequent measurementsite, one first measurement site 20 a that may be the precedingmeasurement site of which the critical dimension measurement isperformed first, among the first measurement sites 20 a including maskpatterns having substantially the same shape and size, may be set as thedefault measurement site, and another first measurement site 20 a, ofwhich the critical dimension measurement is performed after the criticaldimension measurement of the one first measurement site 20 a, may be setas the simple measurement site.

In exemplary embodiments of the present inventive concept, a maskpattern within the default measurement site, among the first measurementsites 20 a, may be designated as a first mask pattern or a default maskpattern, and a mask pattern within the simple measurement sitethereamong may be designated as a second mask pattern or a simple maskpattern.

In an example, when the critical dimension measurement is sequentiallyperformed on the first and second measurement sites 20 a and 20 bcorresponding to the first and second layout areas 30 a and 30 b,described above with reference to FIG. 2, the arrangement density ofmask patterns within the second measurement site 20 b may be lower thanthat of mask patterns within the first measurement site 20 a. Thus, thefirst measurement site 20 a that may be the preceding measurement sitemay be set as the default measurement site, and the second measurementsite 20 b that may be the subsequent measurement site may be set as thesimple measurement site.

In an example, when the critical dimension measurement is sequentiallyperformed on the first and third measurement sites 20 a and 20 ccorresponding to the first and third layout areas 30 a and 30 c,described above with reference to FIG. 2, the size or width of maskpatterns within the third measurement site 20 c may be greater than thatof mask patterns within the first measurement site 20 a. Thus, the firstmeasurement site 20 a that may be the preceding measurement site may beset as the default measurement site, and the third measurement site 20 cthat may be the subsequent measurement site may be set as the simplemeasurement site.

In an example, when the critical dimension measurement is sequentiallyperformed on the first and sixth measurement sites 20 a and 20 fcorresponding to the first and sixth layout areas 30 a and 30 f,described above with reference to FIG. 2, a degree of difficulty ofcritical dimension measurement of mask patterns within the firstmeasurement site 20 a may be similar to a degree of difficulty ofcritical dimension measurement of mask patterns within the sixthmeasurement site 20 f Thus, the first and second measurement sites 20 aand 20 b may be set as default measurement sites.

Within measurement sites of which the critical dimension measurement isperformed sequentially, as the arrangement density of a mask patterndecreases and the size or width of the mask pattern increases, a degreeof difficulty of critical dimension measurement of the mask pattern maydecrease. Similarly, as the arrangement density of a mask patternincreases and the size or width of the mask pattern decreases, a degreeof difficulty of critical dimension measurement of the mask pattern mayincrease.

When the first to sixth measurement sites 20 a to 20 f of the photomask20 are provided as a plurality of measurement sites, the subsequentmeasurement site, described above, may be a measurement site precedinganother measurement site. Thus, the preceding measurement site may bethe simple measurement site.

In an example, when a measurement site that may be the precedingmeasurement site among the first to sixth measurement sites 20 a to 20 fof the photomask 20 is the simple measurement site, a measurement sitethat may be the subsequent measurement site thereamong may be thedefault measurement site or the simple measurement site. For example,when a degree of difficulty of critical dimension measurement of a maskpattern within the subsequent measurement site is higher than a degreeof difficulty of critical dimension measurement of a mask pattern withinthe preceding measurement site that may be the simple measurement site,the subsequent measurement site may be set or classified as the defaultmeasurement site, and when a degree of difficulty of critical dimensionmeasurement of a mask pattern within the subsequent measurement site islower than or equal to a degree of difficulty of critical dimensionmeasurement of a mask pattern within the preceding measurement site, thesubsequent measurement site may be set or classified as the simplemeasurement site.

In an example, when the fourth measurement site 20 d corresponding tothe fourth layout area 30 d, described above with reference to FIG. 2,is the simple measurement site and the preceding measurement site, andthe fifth measurement site 20 e corresponding to the fifth layout area30 e is the subsequent measurement site, a mask pattern within the fifthmeasurement site 20 e may have a higher arrangement density than a maskpattern within the fourth measurement site 20 d. Thus, the fifthmeasurement site 20 e may be set or classified as the defaultmeasurement site.

In an exemplary embodiment of the present inventive concept, the firstto sixth measurement sites 20 a to 20 f may be set or classified as thedefault measurement site and the simple measurement site, using surfacepotential information on mask patterns obtained from the surfacepotential measurement unit 110 of the critical dimension measurementapparatus 100. For example, when a mask pattern within the subsequentmeasurement site has substantially the same potential as a mask patternwithin the preceding measurement site, the subsequent measurement sitemay be set or classified as the simple measurement site. For example,when a mask pattern within the subsequent measurement site has adifferent surface potential from a mask pattern within the precedingmeasurement site, the subsequent measurement site may be set orclassified as the default measurement site.

In an exemplary embodiment of the present inventive concept, when thesum of lengths of measurement regions of interest of mask patternswithin any one measurement site is greater than the length A of thereference measurement region of interest described above with referenceto FIG. 6, the one measurement site may be set or classified as thesimple measurement site, and when the sum of lengths of measurementregions of interest of mask patterns within any one measurement site isless than the length A of the reference measurement region of interestdescribed above with reference to FIG. 6, the one measurement site maybe set or classified as the default measurement site.

Examples of a method of measuring the critical dimensions of the firstmask pattern within the default measurement site in the defaultmeasurement mode and a method of measuring the critical dimensions ofthe second mask pattern within the simple measurement site in the simplemeasurement mode described above with reference to FIGS. 7A or 7B, willbe described with reference to FIGS. 8A and 8B.

FIGS. 8A and 8B are flowcharts illustrating a method of measuringcritical dimensions, according to exemplary embodiments of the presentinventive concept.

Referring to FIGS. 7A or 7B, and 8A, the critical dimensions of thefirst mask pattern within the default measurement site may be measuredin the default measurement mode (S70 a). Measuring the criticaldimensions of the first mask pattern within the default measurement sitein the default measurement mode may include autofocusing (S72) for thefirst mask pattern, pattern matching (S74) for the first mask pattern,and measuring the critical dimensions of the first mask pattern (S76 a).

Autofocusing (S72) may refer to focusing the electron beam 145 of FIG. 1on the surface of the photomask 20 with the object lens 142 of FIG. 1.

Pattern matching (S74) may include matching a reference patternpreviously stored in the information storage part 163 of the controlunit 160 with the first mask pattern. The reference pattern may be apattern that may be obtained from the layout 30, or a pattern that maybe obtained from image information on a mask pattern of the photomask20. Thus, pattern matching (S74) may allow the critical dimensions of ameasurement region of interest of the first mask pattern correspondingto the measurement region of interest described above with reference toFIG. 6 to be accurately measured.

Referring to FIGS. 7A or 7B, and 8B, the critical dimensions of thesecond mask pattern within the simple measurement site may be measuredin the simple measurement mode (S90 a). Measuring the criticaldimensions of the second mask pattern within the simple measurement sitein the simple measurement mode may include performing one or neither ofautofocusing (S72) and pattern matching (S74) for the second maskpattern (S91), and measuring the critical dimensions of the second maskpattern (S96 a).

Since a degree of difficulty of critical dimension measurement of thesecond mask pattern within the simple measurement site is lower than adegree of difficulty of critical dimension measurement of the first maskpattern within the default measurement site, even when one or neither ofautofocusing (S72) and pattern matching (S74) for the second maskpattern is performed, the second mask pattern may be measured and thecritical dimensions of the measurement region of interest of the secondmask pattern may be produced.

Thus, the method of measuring the critical dimensions of the second maskpattern within the simple measurement site in the simple measurementmode may include performing one or neither of autofocusing (S72) andpattern matching (S74) for the second mask pattern, as compared to themethod of measuring the critical dimensions of the first mask patternwithin the default measurement site in the default measurement mode,thus reducing an amount of time required to measure the criticaldimensions of the mask patterns of the photomask 20.

In an exemplary embodiment of the present inventive concept, when ameasurement site among the measurement sites of the photomask 20 is setor classified as the simple measurement site, pattern matching (S74) forthe measurement site may not be performed and critical dimensionmeasurement thereof may be performed.

In an exemplary embodiment of the present inventive concept, when thesubsequent measurement site that may be the simple measurement site,among the measurement sites of the photomask 20, is adjacent to thepreceding measurement site thereamong, autofocusing (S72) for thesubsequent measurement site may not be performed and critical dimensionmeasurement thereof may be performed.

In an exemplary embodiment of the present inventive concept, usingpotential information on mask patterns obtained from the surfacepotential measurement unit 110 of the critical dimension measurementapparatus 100, as described above with reference to FIG. 1, any one ofautofocusing (S72) and pattern matching (S74) for the mask patterns maynot be performed and critical dimension measurement thereof may beperformed. For example, when a mask pattern within the subsequentmeasurement site has substantially the same potential as a mask patternwithin the preceding measurement site, autofocusing (S72) and patternmatching (S74) for the mask pattern within the subsequent measurementsite may not be performed and critical dimension measurement thereof maybe performed.

In an exemplary embodiment of the present inventive concept, asdescribed above with reference to FIG. 6, when the length of ameasurement region of interest of a measurement site is greater than thelength A of the reference measurement region of interest, patternmatching (S74) for the measurement site may not be performed andcritical dimension measurement thereof may be performed. The length ofthe measurement region of interest of the measurement site may be thesum of lengths of measurement regions of interest of all of maskpatterns to be measured within any one measurement site. For example, aplurality of mask patterns to be measured may be within any onemeasurement site and each of the mask patterns to be measured may have ameasurement region of interest, so that the measurement regions ofinterest having a plurality of lengths may be present within the onemeasurement site. Thus, when the sum of lengths of measurement regionsof interest is greater than the length A of the reference measurementregion of interest of FIG. 6 within the any one measurement site, theone measurement site may be set as the simple measurement site, andpattern matching (S74) for the one measurement site may not be performedand the critical dimension measurement thereof may be performed.

In an exemplary embodiment of the present inventive concept, the numberof pixels and the number of scanning times may be adjusted to reduce anamount of time required to measure the critical dimensions of maskpatterns of the photomask 20. Similar to as described above, examples ofa method of measuring critical dimensions, which may reduce an amount oftime required to measure critical dimensions by adjusting the number ofpixels and the number of scanning times, will be described withreference to FIGS. 9A, 9B, and 9C. FIGS. 9A, 9B, and 9C are flowchartsillustrating a method of measuring critical dimensions, according toexemplary embodiments of the present inventive concept.

Referring to FIGS. 7A or 7B, and 9A, the critical dimensions of thefirst mask pattern within the default measurement site may be measuredin the default measurement mode (S70 b). Measuring the criticaldimensions of the first mask pattern within the default measurement sitein the default measurement mode may include autofocusing (S72) for thefirst mask pattern, pattern matching (S74) for the first mask pattern,and measuring the critical dimensions of the first mask pattern (S76 b).Measuring the critical dimensions of the first mask pattern (S76 b) maybe performed using a default number of pixels and a default number ofscanning times. The default measurement mode may include measuring thecritical dimensions of the first mask pattern, using the default numberof pixels and the default number of scanning times.

Referring to FIGS. 7A or 7B, and 9B, the critical dimensions of thesecond mask pattern within the simple measurement site may be measuredin the simple measurement mode (S90 b). Measuring the criticaldimensions of the second mask pattern within the simple measurement sitein the simple measurement mode may include autofocusing (S72) for thesecond mask pattern, pattern matching (S74) for the second mask pattern,and measuring the critical dimensions of the second mask pattern (S96a). Measuring the critical dimensions of the second mask pattern (S96 b)may be performed using a number of pixels less than the default numberof pixels and/or a number of scanning times less than the default numberof scanning times. The simple measurement mode may include measuring thecritical dimensions of the second mask pattern, using the number ofpixels less than the default number of pixels or the number of scanningtimes less than the default number of scanning times.

In an example, the default number of pixels may be about 1,024, and thenumber of pixels less than the default number of pixels may be about512. In an example, the default number of scanning times may be about48, and the number of scanning times less than the default number ofscanning times may be about 16 or 32. The numbers, associated with thepixels and the scanning times, are only examples, and may be modified.

Referring to FIG. 9C, the critical dimensions of the second mask patternwithin the simple measurement site may be measured in the simplemeasurement mode (S90 c). Measuring the critical dimensions of thesecond mask pattern within the simple measurement site in the simplemeasurement mode may include performing one or neither of autofocusing(S72) and pattern matching (S74) for the second mask pattern (S91) andmeasuring the critical dimensions of the second mask pattern (S96 c).Measuring the critical dimensions of the second mask pattern (S96 c) maybe performed using the number of pixels less than the default number ofpixels and/or the number of scanning times less than the default numberof scanning times. Thus, an amount of time required to measure thecritical dimensions of mask patterns may be reduced.

The above-mentioned exemplary embodiments of the critical dimensionmeasurement system and the method of measuring critical dimensions maybe applied to measure the critical dimensions of mask patterns of aphotomask. However, the present inventive concept is not limitedthereto. For example, the above-mentioned exemplary embodiments of thecritical dimension measurement system and the method of measuringcritical dimensions may be applied to measure the critical dimensions ofvarious patterns, as well as mask patterns of a photomask. For example,the above-mentioned exemplary embodiments of the critical dimensionmeasurement system and the method of measuring critical dimensions mayalso be applied to measure the critical dimensions of various patternsformed on a semiconductor wafer. For example, the above-stated photomaskmay be replaced with a wafer, and the previously mentioned mask patternsmay be replaced with photoresist patterns or circuit patterns.

The various operations of methods described above may be performed byany suitable means capable of performing the operations, such as varioushardware and/or software component(s), circuits, and/or module(s).

The software may comprise an ordered listing of executable instructionsfor implementing logical functions, and can be embodied in any“processor-readable medium” for use by or in connection with aninstruction execution system, apparatus, or device, such as a single ormultiple-core processor or processor-containing system.

The blocks or steps of a method or algorithm and functions described inconnection with the embodiments disclosed herein may be embodieddirectly in hardware, in a software module executed by a processor, orin a combination of the two. If implemented in software, the functionsmay be stored on or transmitted over as one or more instructions or codeon a tangible, non-transitory computer-readable medium. A softwaremodule may reside in Random Access Memory (RAM), flash memory, Read OnlyMemory (ROM), Electrically Programmable ROM (EPROM), ElectricallyErasable Programmable ROM (EEPROM), registers, hard disk, a removabledisk, a CD ROM, or any other form of storage medium known in the art.

As set forth above, according to exemplary embodiments of the presentinventive concept, a critical dimension measurement method and acritical dimension measurement system, which may reduce an amount oftime required to measure critical dimensions of mask patterns of aphotomask, may be provided. Thus, a critical dimension measurementapparatus may measure the critical dimensions of a larger number ofphotomasks. Further, the critical dimension measurement method and thecritical dimension measurement system may reduce the amount of timerequired to measure the critical dimensions of the mask patterns, thusenabling the photomask to be formed within a shorter period of time andusing the photomask in a photolithography process. Accordingly, thecritical dimension measurement method and the critical dimensionmeasurement system may reduce an amount of time required to fabricate asemiconductor device from a layout, which may increase productivity.

While the present inventive concept has been shown and described abovewith reference to exemplary embodiments thereof, it will be apparent tothose of ordinary skill in the art that modifications and variations inform and details could be made thereto without departing from the spiritand scope of the present inventive concept, as set forth by thefollowing claims.

What is claimed is:
 1. A critical dimension measurement system,comprising: a voltage measurement circuit configured to measurepotentials of mask patterns of a photomask; a control circuit includingan information storage circuit configured to store distributioninformation on the potentials of the mask patterns, measured by thevoltage measurement circuit, and information on layout patternscorresponding to the mask patterns of the photomask; and a criticaldimension measurement circuit configured to operate, by the controlcircuit, in a first measurement mode and a second measurement moderunning for a shorter time than the first measurement mode, and tomeasure critical dimensions of the mask patterns.
 2. The criticaldimension measurement system of claim 1, wherein the control circuitclassifies measurement sites of the photomask as a first measurementsite and a second measurement site, using the distribution informationon the potentials of the mask patterns and the information on the layoutpatterns, and the information storage circuit of the control circuitstores information on the first measurement site and the secondmeasurement site.
 3. The critical dimension measurement system of claim2, wherein the mask patterns include a first mask pattern within thefirst measurement site and a second mask pattern within the secondmeasurement site.
 4. The critical dimension measurement system of claim3, wherein a critical dimension of the first mask pattern within thefirst measurement site is measured by the critical dimension measurementcircuit operated in the first measurement mode by the control circuit,and a critical dimension of the second mask pattern within the secondmeasurement site is measured by the critical dimension measurementcircuit operated in the second measurement mode by the control circuit.5. The critical dimension measurement system of claim 4, wherein, amongthe potentials of the mask patterns, a potential of the second maskpattern is substantially the same as a potential of the first maskpattern.
 6. The critical dimension measurement system of claim 1,wherein the voltage measurement circuit includes: a first stageconfigured to have the photomask placed thereon; and a voltagemeasurement device including at least two probes configured to contactsurfaces of the mask patterns of the photomask placed on the firststage.
 7. The critical dimension measurement system of claim 6, whereinthe critical dimension measurement circuit includes: a second stageconfigured to have the photomask placed thereon; an electron beamirradiation device configured to irradiate, with an electron beam, themask patterns within measurement sites of the photomask placed on thesecond stage; and a detector configured to detect secondary electronsgenerated by irradiating the mask patterns of the photomask with theelectron beam.
 8. The critical dimension measurement system of claim 6,further comprising: a signal processing circuit; and a display unit,wherein the secondary electrons detected by the detector is convertedinto image data by the signal processing circuit, and wherein the imagedata is displayed as image on the display unit.
 9. The criticaldimension measurement system of claim 1, wherein photomask furthercomprises a substrate, and wherein the mask patterns is on thesubstrate. wherein each of the mask patterns comprises a compound ofmolybdenum (Mo) and silicon (Si).
 10. A critical dimension measurementsystem, comprising: a surface potential measurement circuit configuredto measure potentials of mask patterns of a photomask; a control circuitincluding an information storage circuit configured to storedistribution information on the potentials of the mask patterns measuredby the surface potential measurement circuit; and a critical dimensionmeasurement circuit configured to exchange an electrical signal with thecontrol circuit, and to measure critical dimensions of the mask patternsof the photomask, transferred from the surface potential measurementcircuit, in a default measurement mode and a simple measurement moderunning for a shorter time than the default measurement mode, using thedistribution information on the potentials of the mask patterns.
 11. Thecritical dimension measurement system of claim 10, wherein the defaultmeasurement mode includes performing autofocusing and pattern matchingon a first mask pattern of the mask patterns and measuring criticaldimensions of the first mask pattern, and the simple measurement modeincludes performing one or neither of autofocusing and pattern matchingon a second mask pattern of the mask patterns and measuring criticaldimensions of the second mask pattern.
 12. The critical dimensionmeasurement system of claim 11, wherein, among the potentials of themask patterns, a potential of the second mask pattern is substantiallythe same as a potential of the first mask pattern.
 13. The criticaldimension measurement system of claim 11, wherein the defaultmeasurement mode includes measuring critical dimensions of the firstmask pattern of the mask patterns, using a default number of pixels anda default number of scanning times, and the simple measurement modeincludes measuring critical dimensions of the second mask pattern of themask patterns, using a number of pixels less than the default number ofpixels or a number of scanning times less than the default number ofscanning times.
 14. The critical dimension measurement system of claim10, wherein the surface potential measurement circuit includes: a firststage configured to have the photomask placed thereon; and a surfacemeasurement device including at least two probes configured to contactsurfaces of the mask patterns of the photomask placed on the firststage.
 15. The critical dimension measurement system of claim 14,wherein the critical dimension measurement circuit includes: a secondstage configured to have the photomask placed thereon; an electron beamirradiation device configured to irradiate, with an electron beam, themask patterns within measurement sites of the photomask placed on thesecond stage; and a detector configured to detect secondary electronsgenerated by irradiating the mask patterns of the photomask with theelectron beam.
 16. The critical dimension measurement system of claim15, further comprising: a signal processing circuit; and a display unit,wherein the secondary electrons detected by the detector is convertedinto image data by the signal processing circuit, and wherein the imagedata is displayed as image on the display unit.
 17. A critical dimensionmeasurement system, comprising: a surface potential measurement circuitconfigured to measure potentials of mask patterns; and a criticaldimension measurement circuit configured to measure critical dimensionsof the mask patterns, transferred from the surface potential measurementcircuit, in a default measurement mode and a simple measurement moderunning for a shorter time than the default measurement mode, usingdistribution information on the measured potentials of the maskpatterns.
 18. The critical dimension measurement system of claim 17,wherein the default measurement mode includes further performing atleast one of autofocusing and pattern matching.
 19. The criticaldimension measurement system of claim 17, wherein, among the potentialsof the mask patterns, a potential of the first mask pattern issubstantially the same as a potential of the second mask pattern. 20.The critical dimension measurement system of claim 17, wherein thesurface potential measurement circuit includes: a first stage configuredto have the photomask placed thereon; and a surface measurement deviceincluding at least two probes configured to contact surfaces of the maskpatterns of the photomask placed on the first stage, and wherein thecritical dimension measurement circuit includes: a second stageconfigured to have the photomask placed thereon; an electron beamirradiation device configured to irradiate, with an electron beam, themask patterns within measurement sites of the photomask placed on thesecond stage; and a detector configured to detect secondary electronsgenerated by irradiating the mask patterns of the photomask with theelectron beam.